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- The SPTS division of KLA, designs, manufactures and markets wafer processing solutions for the global semiconductor and related industries.
- SPTS provides industry leading etch and deposition process technologies on a range of single wafer handling platforms.
- End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors.
- SPTS wafer processing solutions include market-leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD and molecular vapor deposition (MVD®), available with a range of wafer-handling options applicable to R&D, pilot production, or volume production environments.
- We design, develop, and manufacture high-tech capital equipment for the global semiconductor markets.
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