Sr. Development Engineer, Electrostatic Chuck

Job DescriptionAbout the RoleWe are seeking a highly experienced and technically driven Senior Development Engineer to lead the development, productization, and support of electrostatic chucks and related subsystems for Axcelis Purion ion implantation systems.This role requires expertise in electrostatic chuck technologies, associated control systems (including power supplies and heater controllers), surface coatings, and wafer particle/contamination management. The engineer will own ESC development from concept through production qualification, working closely with cross‑functional teams and external suppliers to deliver robust, high‑performance solutions.Key ResponsibilitiesESC Productization and DevelopmentOwn ESC development activities from design through production qualification.Lead change notices (CNs), engineering change orders (ECOs), and related PLM processes.Drive ESC testing, validation, and qualification activities.Lead particle and metals Continuous Improvement Projects (CIPs).Develop and maintain comprehensive technical documentation.Field Support and Issue ResolutionProvide expert-level field support for ESC-related issues.Lead root cause analysis and resolution of field issues.Perform on-tool testing and validation activities in support of issue resolution.Partner with suppliers on ESC corrective and preventive actions.Technology and Supplier DevelopmentCollaborate with technology development teams to define production requirements for suppliers.Support coating supplier development and qualification efforts.Conduct new supplier audits and ongoing supplier evaluations.Drive ESC CIPs in collaboration with key suppliers.Controls and Systems IntegrationWork closely with controls teams on ESC chuck/dechuck functionality and thermal (heating/cooling) control systems.Communication, Teamwork and LeadershipPresent technical data, analysis, and recommendations to executive leadership and customers.Collaborate effectively across engineering, manufacturing, quality, and supply chain teams.TravelTravel domestically and internationally as required (approximately 10–25%).RequirementsExperience in electrostatic chuck development for semiconductor wafer processing equipment.Strong working knowledge of coating technology and materials characterizationStrong understanding of semiconductor vacuum systems and wafer processing fundamentals.In-depth knowledge of high-voltage electrical systems and ESC controls architecture.Proven experience with product lifecycle management (PLM), CN/ECO release processes, and related tools.Demonstrated ability to manage and collaborate with domestic and international suppliers.Working knowledge of applicable safety and compliance standards (UL, IEC, NFPA, SEMI).Excellent written and verbal communication skills with strong cross-functional collaboration capabilities.Working knowledge of structured problem solving methods.Ability to thrive in a fast-paced, hands-on development environment.Willingness and ability to work in a cleanroom environment.Ability to work onsite at the Beverly, MA location 3-5 days per week.Education RequirementsMaster’s or PhD degree in Physics or Engineering. Bachelors with relevant capabilities and experience will be considered.Experience RequirementsMinimum 5+ years in electrostatic chuck development in a leading semiconductor equipment company.Preferred ExperienceWorking experience with CAD packages such as CREO/WindchillMatlab, Python or equivalentJMP, Mini-tab or equivalent statistical data analysis programsWorking knowledge of materials characterization techniquesEQUAL OPPORTUNITY STATEMENTIt is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law. Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.U.S. BASE SALARY RANGE$115,513.20 - $173,269.80This base salary range reflects the typical compensation for this role across U.S. locations.Our salary ranges are determined by role and level; individual pay is determined based onmultiple factors, including job-related skills, experience, relevant education or training, worklocation, and internal equity. The range provides the opportunity for growth and progression asyou develop within the role.Base pay is one part of our U.S. total compensation package which includes eligibility in theAxcelis Team Incentive bonus plan, and comprehensive benefits package (for regularemployees working 20+ hours a week).